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Symposium N: Micro and Nanometrology
Principal Organizer:
Nome: Carlos Achete
UFRJ - Inmetro
Endereço: Xerem
Telefone: 021 26799068
Fax: 021 26799021
E-mail:achete@metalmat.ufrj.br
Co-organizer:
Nome: Suzana Peripolli
Filiação profissional: Inmetro
Endereço: Xerem
Telefone: 021 26799021
Fax: 021 26799021
E-mail speripolli@hotmail.com
Description
Micro and nanometrology play a crucial role for the production of novel materials and devices (at the micro and nanoscales), where a high degree of accuracy and reliability is required. They involve not only measurements of length and size, but also force, mass, electrical properties, etc. Nanometrology is essential for the progress of nanotechnology in order to allow for the precise control of properties of varied objects. For the application of nanometrology, standards must be established for the measurements (including reference samples), in addition to scientific instrumentation, because the methods employed for measuring properties on conventional materials may not be applicable to nanostructures. New physical phenomena emerge when the dimensions of a given system reach the nanoscale, which requires knowledge and ability for measurements be performed. The main techniques for such measurements are atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and focused ion beam microscopy (FIB). In addition to the tools and measuring methods, one has to establish unquestionable guidelines for interpreting the measurements in a practical way. Nanometrology is thus a promising field for basic sciences and may offer new opportunities for developing novel products.
The most used techniques in micro and nanometrology mentioned above are increasingly accessible to researchers in universities, research centers and companies. The combination with scanning tunneling microscopy (STM), X-ray diffraction and fluorescence, Raman and infrared spectroscopies is essential for solving problems in various areas.
Topics covered in the Symposium
1. Microscopy in 3D
2. Microscopy and energy
3. Reference Materials
4. Microscopy and the environment
5. Micro and nanometrology
Invited Speakers
Hamish L. Fraser (Ohio State University)
Horst Niehus (Inmetro/Humboldt University)
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