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Seminário: Ion Implant – Beamline to Plasma Immersion, Surface Treatment to FinFETS.

06 dez 2012


Abstract: State of the art in ion implant will be presented, covering applications from surface treatment to the most advanced III-V FinFETimplants.

Presenter: Dean Turnbaugh, IBS (Austin, TX)

Background: IBS developed and manufactures the Pulsion line of plasma immersion ion implanters. It also provides beamline implant services and support to fabs, universities, and research centers worldwide. More at:http://www.ion-beam-services.com/

Local: Laboratório Implantação Iônica da UFRGS e, via web, em http://webconf.ufrgs.br/sbpmat (acesso livre, selecione “Enter as aGuest” e dê seu nome).

Data: 06/12/2012 (quinta-feira).

Horário: 14h00.

Detalhes

Data:
06 dez 2012

Local

Evento presencial (UFRGS) e online.
Brasil

Organizador

Instituto Nacional de Engenharia de Superfícies